Under Zeiss Service contract until Dec 2015. De-installed by Zeiss Dec 2015

Uniplinth Upgrade / W7 (2012)

 

Original Performance Specifications:

• Electron Source: Schottky Field Emitter

• Resolution:  1nm @ 20kV (2mm WD), 3nm @ 1kV (2mmWD)

• Accelerating Voltage: 200V to 30kV

• Probe Current: 4pA to 10nA

• Magnification:  20x to 900,000x

• E-T secondary electron detector

• High efficiency in-lens electron detector

• Robinson BSD

• IR Chamberscope

• Eucentric 5-axis Motorized Stage:

  • X = 75mm

  • Y = 75mm

  • Z = 25mm

  • Tilt: -15 degrees to 90 degrees

  • Rotate: 360 degrees

 

EDX (available optionally)