Zeiss 1530 – Thermal FEG SEM S/N 1128

Under Zeiss Service contract until Dec 2015. De-installed by Zeiss Dec 2015

Uniplinth Upgrade / W7 (2012)

 

Original Performance Specifications:

  • Electron Source: Schottky Field Emitter

  • Resolution:  1nm @ 20kV (2mm WD), 3nm @ 1kV (2mmWD)

  • Accelerating Voltage: 200V to 30kV

  • Probe Current: 4pA to 10nA

  • Magnification:  20x to 900,000x

  • E-T secondary electron detector

  • High efficiency in-lens electron detector

  • Robinson BSD

  • IR Chamberscope

  • Eucentric 5-axis Motorized Stage:

    • X = 75mm

    • Y = 75mm

    • Z = 25mm

    • Tilt: -15 degrees to 90 degrees

    • Rotate: 360 degrees

 

EDX (available optionally)