Hitachi FlexSEM1000 II

FlexSEM1000 II features:

• Resolution 

  • 4.0nm at 20kV(High Vacuum)

  • 15nm at 1kV(High Vacuum)

  • 5.0nm at 20kV (Low Vacuum)

• Magnification

  • 6x-300,000x(photo mode)​

  • 16x-800,000(on display)

• Accelerating Voltage

  • 0.3 to 20 kV​

• Specimen stage

  • 3-Axis Motorized Stage​

  • X: 0-50mm Y:0-40mm Z:5 to 33mm R:360 T:-15 to +90

• Electron Gun

  • Pre-center cartridge filament​

• Detectors

  • Everhart Thornley Secondary Electron Detector​

  • High sensitivity semiconductor BSE detector

• Automatic Image adjustment

  • Auto brightness/contrast​ (ABCC)

  • Auto focus control (AFC)

  • Auto astigmatism correction & focus (ASF)

  • Auto filament saturation (AFS)

  • Auto beam alignment (ABA)

  • Auto start 

• Image data saving

  • 640x480, 1280x960, 2560x1920, 5120x3840 pixels​

• Auxiliary Functions

  • Raster rotation​

  • Dynamic focus

  • Image enhancement

  • Data input (measurement between two points, measurement of angle, characters)

  • Preset magnifcation

  • Stage location navigation system (SEM Map)

  • Beam marking

  • Report creator

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For more information: Hitachi FlexSEM1000

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