Original Performance Specifications:

• Electron Source: Tungsten

• Resolution: 2.5nm at 30kV (LaB6), 3.5nm @30kV (W), 5.5nm @30kV (BSD-VP mode)

• Magnification range: 9x to 900,000x 

• Probe Current

• 1pA to 1uA Optibeam controlled

• Accelerating Voltage: 200V to 30kV 

• Variable Pressure: 1Pa to 400Pa 

• Detectors: Everhart Thornley with VPSE / VPSE or BSD

• Chamber: 300mm x 270mm x 224mm (H)

• 5 axis motorized stage (XYZRT)

  • X travel: 100mm

  • Y travel: 125mm

  • Z travel: 60mm (35mm motorized) 

  • Rotation: 360 ̊ continuous 

  • Tilt: 0 ̊ to 90 ̊

• Image Processor Resolution: up to 3072 x 2304 

• Image Processing: Pixel averaging, continuous averaging, and frame integration

• Oil Diffusion Pump main vacuum 

• One roughing pump 

• Water chiller optional