Zeiss (LEO) 1450

Original Performance Specifications:

  • Electron Source: Tungsten

  • Resolution: 2.5nm at 30kV (LaB6), 3.5nm @30kV (W), 5.5nm @30kV (BSD-VP mode)

  • Magnification range: 9x to 900,000x 

  • Probe Current

  • 1pA to 1uA Optibeam controlled

  • Accelerating Voltage: 200V to 30kV 

  • Variable Pressure: 1Pa to 400Pa 

  • Detectors: Everhart Thornley with VPSE / VPSE or BSD

  • Chamber: 300mm x 270mm x 224mm (H)

  • 5 axis motorized stage (XYZRT)

    • X travel: 100mm

    • Y travel: 125mm

    • Z travel: 60mm (35mm motorized) 

    • Rotation: 360 ̊ continuous 

    • Tilt: 0 ̊ to 90 ̊

  • Image Processor Resolution: up to 3072 x 2304 

  • Image Processing: Pixel averaging, continuous averaging, and frame integration

  • Oil Diffusion Pump main vacuum 

  • One roughing pump 

  • Water chiller optional

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