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Quantitative CL-SEM

Säntis 300


The Säntis 300 system offers 3 distinct acquisition modes : step and repeat (S & R), continuous scanning mode
(AWpix), integrative scanning mode (FWbrush).

– Up to 300 mm wafer tool

– High CL-SEM throughput

– Simultaneous SEM imaging and Optical signature acquisition

– Edge detection for accurate blank wafer positioning (± 5 μ)

– Automated wafer bow mapping and correction


Learn more about Attolight's Säntis 300


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