Quantitative CL-SEM

CORPID_LOGO_Attolight_CMYK_2.bmp
ATT_Santis300.jpg
Säntis 300

 

The Säntis 300 system offers 3 distinct acquisition modes : step and repeat (S & R), continuous scanning mode
(AWpix), integrative scanning mode (FWbrush).


– Up to 300 mm wafer tool


– High CL-SEM throughput


– Simultaneous SEM imaging and Optical signature acquisition


– Edge detection for accurate blank wafer positioning (± 5 μ)


– Automated wafer bow mapping and correction

 
 

Learn more about Attolight's Säntis 300