FlexSEM

Hitachi FlexSEM1000 II

FlexSEM1000 II features:

  • Resolution 

    • 4.0nm at 20kV(High Vacuum)

    • 15nm at 1kV(High Vacuum)

    • 5.0nm at 20kV (Low Vacuum)

  • Magnification

    • 6x-300,000x(photo mode)​

    • 16x-800,000(on display)

  • Accelerating Voltage

    • 0.3 to 20 kV​

  • Specimen stage

    • 3-Axis Motorized Stage​

    • X: 0-50mm Y:0-40mm Z:5 to 33mm R:360 T:-15 to +90

  • Electron Gun

    • Pre-center cartridge filament​

  • Detectors

    • Everhart Thornley Secondary Electron Detector​

    • High sensitivity semiconductor BSE detector

  • Automatic Image adjustment

    • Auto brightness/contrast​ (ABCC)

    • Auto focus control (AFC)

    • Auto astigmatism correction & focus (ASF)

    • Auto filament saturation (AFS)

    • Auto beam alignment (ABA)

    • Auto start 

  • Image data saving

    • 640x480, 1280x960, 2560x1920, 5120x3840 pixels​

  • Auxiliary Functions

    • Raster rotation​

    • Dynamic focus

    • Image enhancement

    • Data input (measurement between two points, measurement of angle, characters)

    • Preset magnifcation

    • Stage location navigation system (SEM Map)

    • Beam marking

    • Report creator

For more information: Hitachi FlexSEM1000

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